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º»°ÝÀûÀÎ ICR(»ê¾÷¿ëÅ©¸°·ë)±Ô°ÝÀ¸·Î 1963³â ¹Ì±¹¿¬¹æ±Ô°Ý 209B(Federal Standard 209B)°¡ Á¦Á¤µÇ¾ú´Ù. ±Ô°ÝÀº ûÁ¤µµ ÀÌ¿Ü, ¾Ð·Â, ±â·ù¼Óµµ, ¿Âµµ, ½Àµµ, Á¶µµ¿¡ ÀÇÇØ ´ëÇØ¼µµ ±ÔÁ¤Çϰí ÀÖ´Ù. FS209´Â 1988³âÀÇ 209D, 1992³âÀÇ 209E¿Í ¼öȸ º¯°æµÇ¾ú´Ù. ÇÑÆí, ´Ù¸¥ ³ª¶ó¿¡¼´Â FS209¸¦ Âü°í·Î ÇÏ¿© µ¶ÀÚÀÇ ±Ô°ÝÀ» »ç¿ëÇϰí ÀÖ´Ù. ÀϺ»¿¡¼´Â 1§©ÀÇ °ø±âÁß¿¡ Æ÷ÇԵǾîÀÖ´Â ÀÔÀÚ°æÀÌ 0.1§ÀÌ»óÀÇ ÀÔÀÚ¼ö¸¦ 10ÀÇ ÀÚ½ÂÀ¸·Î Ç¥½ÃÇÑ Áö¼ö (10N/§©ÀÇ N)¸¦ Ŭ¶ó½º Ç¥½Ã·Î Çϰí ÀÖ´Ù. ±×¸®°í 1999³â ûÁ¤µµ¿¡ °üÇÑ ±¹Á¦±Ô°ÝÀÎ ISO14644°¡ ¹ßÇ¥µÇ¾î ¼¼°èÀû ±Ô°ÝÀÇ ÅëÀÏ¿¡ ÇÑ¹ß ÀüÁøÇÏ°Ô µÇ¾ú´Ù. BCR(»ý¹°¿ëÅ©¸°·ë)±Ô°ÝÀº NASA±Ô°Ý¿¡ ±ÔÁ¤µÇ¾î ÀÖ°í, NHB 5340.1°ú 5340.2°¡ ÀÖ´Ù. ÀÌµé ±Ô°ÝÀÇ ³»¿ëÀº FS209B ¿Í °ÅÀÇ °°Áö¸¸, ¹Ì»ý¹° ³óµµ¸¦ ´õÇϰí ÀÖ´Ù. ÀÌµé ±Ô°Ý¿¡¼ »ý¹°ÀÔÀÚ¿¡ °üÇÑ ±ÔÁ¤¸¸À» ÃßÃâÇÑ °ÍÀÌ´Ù. ¹Ì»ý¹°Àº Å« °ÍÀº ´Üµ¶À¸·Î ÀÛÀº °ÍÀº ¹ÌÀÔÀÚ¿¡ ºÎÂøÇÏ¿© °ø±âÁß¿¡ ºÎÀ¯Çϱ⠶§¹®¿¡ ¹ÌÀÔÀÚ¸¦ Á¦¾î ÇÏ´Â °ÍÀº ¹Ì»ý¹°À» Á¦¾îÇÏ´Â °ÍÀ̶ó ÇÒ ¼ö ÀÖ´Ù. ±×¿ÜÀÇ °ü·Ã ±Ô°ÝÀ¸·Î´Â GMP(Good Manufacturing pracice)ÀÌ ÀÖ°í, ÀǾàǰÁ¦Á¶°øÀå¿¡¼ »ý»ê´Ü°èÀÇ Ç°Áú°ü¸®¸¦ À§ÇÑ ±âÁØÀ» Á¤Çϰí ÀÖ´Ù. ºÎÀ¯¹ÌÀÔÀÚÀÇ ÃøÁ¤Àº °ü»ê¶õ½ÄÀÔÀÚ°è¼ö±â(LPCµî)¶Ç´Â ÀÀÃàÇÙ°è¼ö±â(CPC)¸¦ ÀÌ¿ëÇÑ´Ù. ¹Ì»ý¹° ÃøÁ¤Àº °øÁߺÎÀ¯±Õ, ³«ÇϱÕ, Ç¥¸éºÎÂø±ÕÀ¸·Î ³ª´©°í, »óȲ¿¡ µû¸¥ ÃøÁ¤¹ýÀÌ ÀÖÁö¸¸ ÀÌµé ¸ðµÎ°¡ ¼ÒÁ¤ÀÇ ¹è¾ç¹ýÀ¸·Î ¹ßÀ°½ÃŲ ±ÕÁý¶ô(colony)¼ö¸¦ ÃøÁ¤ÇÑ´Ù. |
ISO 14644-1 ûÁ¤µµ µî±ÞÀÇ ºÐ·ù |
ISO µî±ÞºÐ·ù |
No of Particles per §© |
0.1§ |
0.2§ |
0.3§ |
0.5§ |
1.0§ |
5.0§ |
ISO µî±Þ1 |
10 |
2 |
NA |
NA |
NA |
NA |
ISO µî±Þ2 |
100 |
24 |
10 |
4 |
NA |
NA |
ISO µî±Þ3 |
1,000 |
237 |
102 |
35 |
8 |
NA |
ISO µî±Þ4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
NA |
ISO µî±Þ5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
ISO µî±Þ6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
ISO µî±Þ7 |
NA |
NA |
NA |
352,000 |
83,200 |
2,930 |
ISO µî±Þ8 |
NA |
NA |
NA |
3,520,000 |
832,000 |
29,300 |
ISO µî±Þ9 |
NA |
NA |
NA |
35,200,000 |
8,320,000 |
293,000 |
|
NA : NOT APPLICATION |
ISO 14644-1 ûÁ¤µµ µî±ÞÀÇ ºÐ·ù |
KS M ISO µî±ÞºÐ·ù |
No of Particles per §© |
0.1§ |
0.2§ |
0.3§ |
0.5§ |
1.0§ |
5.0§ |
KS M ISO µî±Þ1 |
10 |
2 |
NA |
NA |
NA |
NA |
KS M ISO µî±Þ2 |
100 |
24 |
10 |
4 |
NA |
NA |
KS M ISO µî±Þ3 |
1,000 |
237 |
102 |
35 |
8 |
NA |
KS M ISO µî±Þ4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
NA |
KS M ISO µî±Þ5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
KS M ISO µî±Þ6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
KS M ISO µî±Þ7 |
NA |
NA |
NA |
352,000 |
83,200 |
2,930 |
KS M ISO µî±Þ8 |
NA |
NA |
NA |
3,520,000 |
832,000 |
29,300 |
KS M ISO µî±Þ9 |
NA |
NA |
NA |
35,200,000 |
8,320,000 |
293,000 |
|
NA : NOT APPLICATION |
ISO 14644-1 & FS 209E ûÁ¤µµ µî±Þ ºñ±³Ç¥ |
Cleanliness Classification |
No of Particles per §© |
ISO 14644-1 |
FS 209E |
0.1§ |
0.2§ |
0.3§ |
0.5§ |
1.0§ |
5.0§ |
ISO µî±Þ1 |
- |
10 |
2 |
NA |
NA |
NA |
NA |
ISO µî±Þ2 |
- |
100 |
24 |
10 |
4 |
NA |
NA |
ISO µî±Þ3 |
- |
1,000 |
237 |
102 |
35 |
8 |
NA |
- |
1 |
1,240 |
265 |
106 |
35.3 |
NA |
NA |
ISO µî±Þ4 |
- |
10,000 |
2,370 |
1,020 |
352 |
83 |
NA |
- |
10 |
12,400 |
2,650 |
1,060 |
353 |
NA |
NA |
ISO µî±Þ5 |
- |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
- |
100 |
NA |
26,500 |
10,600 |
3,530 |
NA |
NA |
ISO µî±Þ6 |
- |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
- |
1,000 |
NA |
NA |
NA |
35,300 |
NA |
247 |
ISO µî±Þ7 |
- |
NA |
NA |
NA |
352,000 |
83,200 |
2,930 |
- |
10,000 |
NA |
NA |
NA |
353,000 |
NA |
2,470 |
ISO µî±Þ8 |
- |
NA |
NA |
NA |
3,520,000 |
832,000 |
29,300 |
- |
100,000 |
NA |
NA |
NA |
3,530,000 |
NA |
24,700 |
ISO µî±Þ9 |
- |
NA |
NA |
NA |
35,200,000 |
8,320,000 |
293,000 |
|
NA : NOT APPLICATION |
|
¹ÙÀÌ¿À
Å©¸°·ëÀÇ
ûÁ¤µµ |
ÀÔÀÚ |
¹Ì»ý¹°ÀÔÀÚ |
¾Ð·Â
(mmAq) |
¿Âµµ
(¡É) |
½Àµµ
(%) |
±â·ùȯ±âȸ¼ö |
Á¶µµ(lux) |
ÀÔ°æ
(§) |
´©Àû ÀÔÀÚ¼ö |
ºÎÀ¯·® |
ħ°·® |
°³/ft3 |
°³/§© |
°³/ft3 |
°³/§© |
°³/§©
ÁÖÀÏ |
100 |
¡Ã 0.5 |
¡Â 100 |
¡Â 3.5 |
0.1 |
0.0035 |
12,900 |
1.3ÀÌ»ó |
ÁöÁ¤ |
40~45 |
- Ãþ·®¹æ½Ä
0.45M/s
¡¾0.1M/s
- ³·ù¹æ½Ä
¡Ã 20ȸ/½Ã°£ |
1,080~1,620 |
10,000 |
¡Ã 0.5
¡Ã 5.0 |
¡Â 10,000
¡Â 65 |
¡Â 350
¡Â 2.3 |
0.5 |
0.0176 |
64,600 |
100,000 |
¡Ã 0.5
¡Ã 5.0 |
¡Â 100,000
¡Â 700 |
¡Â 3500
¡Â 2.5 |
2.5 |
0.0884 |
323,000 |
|
JIS B9920 ûÁ¤µµ µî±ÞÀÇ ºÐ·ù |
µî±ÞºÐ·ù |
No of Particles per §© |
ûÁ¤µµ CLASS ÀÔ°æ¹üÀ§ |
0.1§ |
0.2§ |
0.3§ |
0.5§ |
5.0§ |
CLASS 1 |
10 |
2 |
1 |
0.35 |
NA |
0.1~0.3 |
CLASS 2 |
100 |
24 |
10 |
3.5 |
NA |
CLASS 3 |
1,000 |
236 |
101 |
35 |
NA |
0.1~0.5 |
CLASS 4 |
10,000 |
2,360 |
1,010 |
350 |
NA |
CLASS 5 |
100,000 |
23,600 |
10,100 |
3,500 |
NA |
0.1~0.5 |
CLASS 6 |
1,000,000 |
NA |
101,000 |
35,000 |
29 |
0.3~0.5 |
CLASS 7 |
10,000,000 |
NA |
1,010,000 |
350,000 |
2,900 |
CLASS 8 |
100,000,000 |
NA |
10,100,000 |
3,500,000 |
29,000 |
|
NA : NOT APPLICATION |
GMP ûÁ¤µµ °ü¸® ±âÁØ |
ûÁ¤µµµî±Þ |
CLASS |
ÇØ´çÀÛ¾÷½Ç(¿¹½Ã) |
±¸Á¶ Á¶°Ç |
ȯ±â Ƚ¼ö |
°ü¸® ±âÁØ |
A |
100 |
- ¹«±ÕÀû ÀÛ¾÷°øÁ¤À» ¼öÇàÇÏ´Â ÀÛ¾÷´ë
- ¹«±Õ Á¦Á¦ÀÇ ÃæÀü, ¹ÐºÀÀÛ¾÷´ë |
- ´ÜÀÏ ¹æÇâ±â·ù
- Clean Bench/booth(B±¸¿ª³» ¼³Ä¡)
- HEPA FILTER |
- ¼öÁ÷Çü:¾à0.3m/s
- ¼öÆòÇü:¾à0.45m/s
- 600ȸ/hrÀÌ»ó |
- ÃÖ´ë »ý±Õ¼ö
³«ÇϱÕ:[1°³/hr(¥Õ9cm)]
ºÎÀ¯±Õ:[1°³/§©]
- ¹«±Õº¹Àå |
B |
10,000 |
- ¹«±ÕÁ¦Ç°ÀÇ ÀÛ¾÷½Ç ¹× ¹«±ÕÀÛ¾÷¿¡ ÇÊ¿äÇÑ °ü¸® ±¸¿ª
- ¹«±Õ ÀÛ¾÷ Àü¿ëÀÇ °»ÀÇ½Ç ¹× Áغñ½Ç |
- ºñ´ÜÀÏ ¹æÇâ ±â·ù
- PRE + MEDIUM + HEPAFILTER
- ¾ç¾Ð(10~15Pa) |
- 20ȸ/hrÀÌ»ó |
- ÃÖ´ë »ý±Õ¼ö
³«ÇϱÕ:5°³/hr
ºÎÀ¯±Õ:20°³/§©
- ¹«±Õº¹Àå |
C |
100,000 |
- ¹«±ÕÁ¦Ç°ÀÇ ¿ë±â ¼¼Ã´½Ç
- ÃÖÁ¾¸ê±ÕÁ¦Ç°(»ç¿ëÀÚ ¸ê±Õ Æ÷ÇÔ)ÀÇ ¼¼Ã´½Ç, ¼¼Ã´ ÈÄ º¸°ü½Ç
- ÃÖÁ¾¸ê±ÕÁ¦Ç°(»ç¿ëÀÚ ¸ê±Õ Æ÷ÇÔ)ÀÇ ÀÛ¾÷½Ç(ÃæÀü, Á¶¸³, Á÷Á¢Æ÷Àå µî)
- ºñ¸ê±Õ»óÅ·Π°ø±ÞµÇ³ª ±× û°áÀÌ »ç¿ë»ó Áß¿äÇÑ Á¦Ç°ÀÇ ÀÛ¾÷½Ç |
- ºñ´ÜÀÏ ¹æÇâ ±â·ù
- PRE + MEDIUM(ÇÊ¿ä½Ã+HEPA) FILTER
- ¾ç¾Ð(10~15Pa)
- ¿Â,½Àµµ °ü¸®
|
- 10ȸ/hrÀÌ»ó |
- ÃÖ´ë »ý±Õ¼ö
³«ÇϱÕ:20°³/hr
ºÎÀ¯±Õ:200°³/§©
- Àü¿ëÀÇ ¹«Áøº¹Àå |
D |
- |
- ûÁ¤µµ C±¸¿ª°ú ¿¬°áµÈ Áö¿ª
- ¹«Áø º¹Àå °»ÀÇ½Ç |
- PRE FILTER
- ¿Â, ½Àµµ °ü¸® |
- ȯ±â |
|
|
±¹Á¦ Å©¸°·ë ±Ô°ÝÀÇ Á¾·ù |
Á¾·ù |
±Ô°Ý |
°ø±â ûÁ¤µµ µî±Þ |
¹Ì±¹ Federal Standard 209E(1992) |
ÀϺ» JIS B 9920(1989) |
µ¶ÀÏ VDI 2083(1990) |
Çѱ¹ KS B 6741(1995), SPS-KACA001-0131(1996) |
KS M ISO 14644-1(2002), KS M ISO 14644-2(2002) |
±¹Á¦ ISO 14644-1(1999), ISO 14644-2(2000) |
¼º´É Æò°¡ |
¹Ì±¹ IEST-RP-CC006.3(2004) |
ÀϺ» JACA No.24(1989) |
Çѱ¹ SPS-KACA001-0131(1996), SPS-KACA003-0133(2000) |
KS M ISO 14644-3(2006) |
±¹Á¦ ISO 14644-3(2005) |
¼³°è, ½Ã°ø Á¦ÀÛ |
Çѱ¹ SPS-KACA001-0131(1996), KS M ISO 14644-4(2002) |
±¹Á¦ ISO 14644-4(2001) |
¿î¿µ °ü¸® |
¹Ì±¹ IEST-RP-CC026.1(1994) |
ÀϺ» JACA No.14C(1992) |
Çѱ¹ SPS-KACA001-0131(1996), KS M ISO 14644-5(2005) |
±¹Á¦ ISO 14644-5(2004) |
±âŸ |
¹Ì±¹ IEST-RP-CC023.1(1993) |
±¹Á¦ ISO 14644-7(2004), ISO 14644-8 |
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